X-ray fluorescence analysis

A nondestructive physical method used for chemical elemental analysis of materials in the solid or liquid state. The specimen is irradiated by photons or charged particles of sufficient energy to cause its elements to emit (fluoresce) their characteristic x-ray line spectra. The detection system allows the determination of the energies of the emitted lines and their intensities. Elements in the specimen are identified by their spectral line energies or wavelengths for qualitative analysis, and the intensities are related to their concentrations for quantitative analysis. Computers are widely used in this field, both for automated data collection and for reducing the x-ray data to weight-percent and atomic-percent chemical composition or area-related mass (of films).  See also: Fluorescence

The materials to be analyzed may be solids, powders, liquids, or thin foils and films. The crystalline state normally has no effect on the analysis, nor has the state of chemical bonding, except for very light elements. All elements above atomic number 12 can be routinely analyzed in a concentration range from 0.1 to 100 wt %. Special techniques are required for the analysis of elements with lower atomic numbers (4–11) or of lower concentrations, and for trace analysis. The counting times required for analysis range from a few seconds to several minutes per element, depending upon specimen characteristics and required accuracy; but they may be much longer for trace analysis and thin films. The results are in good agreement with wet chemical and other methods of analysis. The method is generally nondestructive for most inorganic materials in that a suitably prepared specimen is not altered by the analytical process.

 

Basis of method

 

The theory of the method has its origin in the classic work by H. G. J. Moseley, who in 1913 measured x-ray wavelengths of a series of elements. He found that each element had a simple x-ray spectrum and characteristic wavelengths, and that there was a linear relationship between and Z, where λ is the x-ray wavelength and Z is the atomic number of the element emitting the x-ray. For example, a plot of Moseley's law can be used to show the K and L x-ray lines (Fig. 1). Aside from the discovery of the element hafnium in zirconium ores by G. von Hevesy, only a few practical uses of the relationship were reported until about 1950, when the introduction of modern x-ray equipment made it feasible to use x-rays for routine spectrochemical analysis of a large variety of materials.

 

 

Fig. 1  Plot of Moseley's law, showing dependence of characteristic x-ray-line wavelengths λ on atomic number Z. 1 A = 0.1 nm. (After Philips Tech. Rev., vol. 17, no. 10, 1956)

 

 

 

fig 1

 

 

 

An x-ray source is used to irradiate the specimen, and the emitted x-ray fluorescence radiation is analyzed with a spectrometer. The fluorescence radiation is diffracted by a crystal at different angles in order to separate the wavelengths and identify the elements, and the concentrations are determined from the relative intensities. Scintillation or gas proportional counters are generally used as detectors. This procedure is widely used and is called the wavelength dispersive method.

Around 1965, lithium-drifted silicon and germanium [Si(Li) and Ge(Li)] solid-state detectors became available for x-ray analysis. These detectors have better energy resolution, and the average pulse amplitudes are directly proportional to the energies of the x-ray quanta, which can be sorted electronically with a multichannel pulse-height analyzer. This eliminates the need for the crystal and is called the energy dispersive method. Recent developments include cryogenically cooled detectors based on superconducting tunnel junctions. They combine a far better energy resolution with the ability to detect the emission lines from very light elements.

 

X-ray spectra

 

The origin of x-ray spectra may be understood from the simple Bohr model of the atom in which the electrons are arranged in orbits within the K, L, M, … shells. If a particle or photon with sufficient energy is absorbed by the atom, an electron may be ejected from one of the inner shells and is promptly replaced by an electron from one of the outer shells. This results in the emission of a characteristic x-ray spectral line whose energy is equal to the difference of the binding energies of the two orbits involved in the electron transition. The new vacancy is filled by an additional transition from the outer shells, and this is repeated until the outermost vacancy is filled by a free electron. The sum of energies of all photons emitted during the vacancy-refilling cascade is the ionization energy. The energy of the emitted line from the first transition in the cascade has a slightly lower energy than the ionization energy. For example, the ionization energy for the copper K shell is 8.98 keV, and the observed lines have energies of 8.90 keV (CuKβ) and 8.04 keV (CuKα); the corresponding wavelengths are 0.138, 0.139, and 0.154 nanometer. Altogether the energies of x-ray K-lines extend over three orders of magnitude from 0.111 keV (11.2XXX nm, BeKα) to 114.45 keV (0.0108 nm, UKβ2).

Optical emission lines result from resonant electron transitions in the outer (valence) shells, producing complex spectra with a large number of lines. By contrast, the x-ray lines arise only from a limited number of transitions between the high-energy levels of the inner shells, so that the x-ray spectrum of an element consists of relatively few lines. They are always initiated by a primary ionization event. Lines are named after the shell where the corresponding electron transition ends (K, L, M, … lines). The most probable transition yielding the highest line intensity in this series is named alpha, followed by beta, gamma, and others, and the indices 1, 2, 3, … define a specific transition within the subseries. Depending on the number of energy sublevels in each shell, there are usually only a few important lines in the K spectrum (Kβ, Kα1, Kα2) and a dozen or more lines in the L spectrum. The M lines are rarely used in x-ray analysis.

 

Auger effect

 

Occasionally, instead of the emission of the characteristic photon in the course of an electron transition, inner atomic absorption occurs (internal conversion or the Auger effect) when the photon appears to ionize the atom in an additional shell. The existence of an intermediate fluorescent photon is, however, denied by the quantum-mechanical explanation of the Auger effect and should serve only as an aid to illustrate the energy transfer. The ejected Auger electron has a well-defined energy, namely, the energy of the internally absorbed (virtual) photon minus its ionization energy, and can be used for chemical analysis. The probability that no Auger effect occurs, that is, that the photon is actually emitted from the atom and can be used for analysis, is called fluorescence yield. It is thereby the complementary probability to the Auger effect and is higher than 50% for K-shell ionization of elements with atomic numbers above 31 (gallium). For low-atomic-number elements, the Auger effect dominates and the fluorescence is low. This is one of the main reasons for the difficulties in the analysis of very light elements, such as berillium, boron, and carbon, where the fluorescent yield is only 10−4 to 10−3.  See also: Auger effect; Electron spectroscopy

 

X-ray absorption

 

The type of absorption of the photon or particle leading to the original ionization of the atom is called photoabsorption, to distinguish it from absorption by coherent scattering or Compton scattering. The probability of photoabsorption decreases gradually with increasing photon (or particle) energy, but abruptly increases by an order of magnitude when the photon energy exceeds the ionization energy of a shell. This energy is also called the absorption-edge energy (shown for the K and L edges of molybdenum and silver in Fig. 2). Thus the x-rays with energies just higher than the absorption-edge energy are most efficient in generating x-ray fluorescence. The efficiency decreases as the photon energy E is further increased from the edge approximately as 1/E3 or λ3. Photons with smaller energies than the absorption edge have no effect in exciting fluorescence.

 

 

Fig. 2  Mass absorption coefficients of molybdenum (Mo) and silver (Ag) in the 1–50-keV region. Roman numerals indicate edges associated with subshells of the L shell.

 

 

 

fig 2 

 

 

The absorption of x-rays is usually given as a mass absorption coefficient μ/ρ (usually expressed in cm2 g−1) and is independent of the physical state of the material. If more than one element is present, the weighted average of the coefficients of the individual elements is used. Tables of mass absorption coefficients have been compiled. The decrease of intensity of x-rays as they traverse the material is given by the linear absorption coefficient μ (usually expressed in cm−1), obtained by multiplying the mass absorption coefficient by the density ρ of the material. The intensity decreases to e−μx of its original value when the x-rays pass through a layer x centimeters thick.

 

 

Radiation sources

 

There are two general methods for producing x-ray spectra for fluorescence analysis excitation by photons and excitation by charged particles. The most common method is to expose the specimen to the entire spectrum emitted from a standard x-ray tube. It is sometimes modified by using a secondary target material (or monochromator) outside the x-ray tube to excite fluorescence. This has the advantage of selecting the most efficient energy close to the absorption edge of the element to be analyzed and reducing or not exciting other interfering elements, but the intensity is reduced by two or three orders of magnitude. Further alternatives are radioactive sources and synchrotron radiation.

The other method, used in electron microscopes and the electron microprobe, uses an electron beam directly on the specimen, and each element generates its own x-ray spectrum, under electron bombardment, as in an x-ray tube.  See also: Electron microscope

 

X-ray tubes

 

The radiative spectrum from an x-ray tube consists of continuous radiation (bremsstrahlung) and characteristic lines. Continuous radiation is emitted in the course of scattering (that is, deceleration) of electrons by the nuclei of the target atoms. Characteristic radiation is excited by electrons similarly to excitement by photons, and comes from the electronic shells. The primary x-ray-tube targets are usually tungsten, copper, rhodium, molybdenum, silver, and chromium. It is usually necessary to avoid the use of a tube whose target is identical to that of an element in the specimen, because the line spectrum from the target is scattered through the system, adding to the element signal. It is also desirable to select a target whose characteristic line energies lie closely above the absorption edges of the elements to be analyzed. For example, the WL lines and CuK lines are more efficient in exciting fluorescence in the transition elements chromium to copper than are the MoK lines; RhL lines are most useful to excite K lines of elements below sulfur in the periodic table. Tubes for fluorescence analysis usually have a single thin beryllium window placed at the side of the tube.  See also: Bremsstrahlung

Equipment is normally operated at x-ray-tube voltages of 20–60 kV in dc operation at up to 3 kW or more with water cooling. These voltages generate the K spectra of all the elements up to the rare earths and the L spectra of the higher-atomic-number elements. Since the detector is moved from point to point, it is essential to have a constant primary intensity and to stabilize the voltage and tube current.  See also: X-ray tube

 

Radioactive isotopes

 

Radioactive isotopes that produce x-rays, such as iron-55 (MnK x-rays) and americium-241 (NpL x-rays), are used in place of an x-ray tube to excite fluorescence in some applications. These sources are much weaker than x-ray tubes and must be placed close to the specimen. They are often used in field applications where portability and size may be considerations. Alpha particles have been occasionally used. An example is the excitation source in the α-proton x-ray spectrometer (APXS) built into the Mars exploration vehicle Sojourner (Mars Pathfinder mission 1997/1998; Fig. 3).  See also: Radioactivity

 

 

Fig. 3  Alpha-Proton X-ray Spectrometer (APXS) used on Mars Pathfinder Mission of 1997/1998. (a) Mars rover Sojourner, rear view showing spectrometer (copyright © 1997, Jet Propulsion Laboratory, California Institute of Technology, and the National Aeronautics and Space Administration). (b) Comparison of chemical composition of rocks on Earth, of various meteorites found on Earth but presumably originating from Mars, and materials analyzed by APXS near the landing site on Mars.

 

 

 

fig 3

 

 

 

 

Synchrotron radiation

 

Synchrotron radiation has many potential advantages. The continuous radiation is several orders of magnitude more intense than that of x-ray tubes and can be used with a crystal spectrometer. In addition, a tunable crystal monochromator can be placed in the incident beam to select the optimum wavelength for fluorescing each element in the specimen. Because of its high intensity and parallelism, a very narrow beam of synchrotron radiation can be masked out in order to illuminate individual spots or grains of inhomogeneous materials. Another application is ultra-trace analysis.  See also: Synchrotron radiation

 

Crystal spectrometer

 

A single-crystal plate is used to separate the various wavelengths emitted by the specimen. Diffraction from the crystal occurs according to Bragg's law, Eq. (1),

 

 

fur 1

 

where n is a small integer giving the order of reflection, λ the wavelength, d the spacing of the particular set of lattice planes of the crystal that are properly oriented to reflect, and θ the angle between those lattice planes and the incident ray.  See also: X-ray crystallography

Reflection for a particular λ and d occurs only at an angle 2θ with respect to the incident ray, and it is therefore necessary to maintain the correct angular relationship of the crystal planes at one-half the detector angle. This is done by the goniometer, which is geared to rotate the crystal at one-half the angular speed of the counter tube, and therefore both are always in the correct position to receive the various wavelengths emitted by the specimen (Fig. 4). For a given d, there is only one angle (for each order of reflection) at which each wavelength is reflected, the angle increasing with increasing wavelength. The identification of elements by the reflection angles for their emission lines is greatly simplified by modern computer-controlled spectrometers. The angular separation of the lines, or the dispersion, given by Eq. (2),

 

 

fur 2

 

increases with decreasing d. It is thus easy to increase the dispersion simply by selecting a crystal with a smaller d. Reducing d also limits the maximum wavelength that can be measured since λ = 2d at 2θ = 180°; the maximum 2θ angle that can be reached in practice with the goniometer is about 150°.

 

 

Fig. 4  X-ray fluorescence spectrograph (not to scale). Diffracted-beam Soller slit is optional.

 

 

 

fig 4

 

 

 

 

Soller slits

 

The crystals are usually mosaic, and the reflection is spread over a small angular range. To increase the resolution, that is, decrease the line breadth, it is necessary to limit the angular range over which a wavelength is recorded. Parallel or Soller slits are used for this purpose (Fig. 4). These slits consist of thin (0.002-in. or 0.05-mm) equally spaced flat foils of materials such as nickel and iron, and the angular aperture is determined by the length and spacing. A typical set for fine collimation would have 0.005-in. (0.13-mm) spacings and 4-in. (100-mm) length with angular aperture 0.15° and cross section 0.28 in. (7.11 mm) square. Wider angular apertures of up to a few degrees are used with multilayer mirrors for light-element analysis. The absorption of the foils is sufficiently high to prevent rays that are inclined by more than the angular aperture to extend beyond the specimen area and enter the counter tube. Two sets of parallel slits may be used, one set between the specimen and crystal and the other between crystal and detector. This greatly increases the resolution and peak-to-background ratio, and causes a relatively small loss of peak intensity.

 

Diffracting crystals

 

Crystals commonly used in spectrometers are lithium fluoride (LiF) with reflecting plane (200) or (220), silicon (111) and (220), pentaerythritol (001), acid phthalates of potassium and thallium (001), and ethylene diamine d-tartrate (020). It is essential that the crystal be of good quality to obtain sharp, symmetrical reflections. Unless the crystal is homogeneous, the reflection may be distorted, and portions of the reflections may occur at slightly different angles. Such effects would decrease the peak intensities of the wavelengths by varying amounts, causing errors in the analysis.

 

Multilayer mirrors

 

The longest wavelength that can be routinely analyzed with a natural crystal is around 2.4 nm (OKα). Multilayer structures are employed as dispersive devices for lighter elements. They consist of a periodic stack of layer pairs alternating a heavy element (with high scattering power for x-rays) and light elements (serving as a spacer). The scattered partial waves from the heavy-element layers interfere constructively at certain angles in a way similar to that in crystals, but can have much longer wavelengths corresponding to the layer spacing.

 

Rapid analysis systems

 

In certain industrial applications such as the manufacture of cement, steels, and glass, and in geological exploration, large numbers of specimens containing up to a dozen or more elements must be rapidly analyzed. In some cases, the analysis must be done in a few minutes to correct the composition of a furnace that is standing by. Generally the same qualitative compositions have to be routinely analyzed, and instead of sequentially scanning over the wavelength regions, a number (up to 30) of fixed crystals and detectors are positioned around the specimen in order to allow simultaneous measurements of several elements at peak and background positions. Automated trays load the specimens into the spectrometer.

 

Detectors

 

The detectors generally used in crystal spectrometers are scintillation counters with thin beryllium windows and thallium-activated sodium iodide [NaI(Tl)] crystals for higher energies (above 4 keV), and gas flow counters with very low absorbing windows and argon/methane gas for the low-energy region (below 6 keV). A single-channel pulse-amplitude analyzer limits photon counting to a selected energy interval to improve the peak-to-background ratio and to eliminate higher-order reflections. However, no sharp energy separation is possible due to the rather limited energy resolution of these detectors.  See also: Gamma-ray detectors; Particle detector; Scintillation counter

 

Energy dispersive systems

 

Solid-state detectors with good energy resolution are used in conjunction with a multichannel pulse-amplitude analyzer. No crystals are required, and the detector and specimen are stationary during the measurement. The method is used with either electron-beam excitation in electron microscopes or with x-ray-tube sources. The photons of various energies are registered, and their energies are determined as soon as they enter the detector. As this occurs statistically for the various fluorescence line energies, the acquisition of the spectral data appears to be simultaneous for all lines.

 

Solid-state detectors

 

Lithium-drifted silicon [Si(Li)] detectors are generally used for the lower energies of fluorescence analysis, while lithium-drifted germanium [Ge(Li)] detectors are more often used for nuclear high-energy gamma-ray detection. The energy resolution of good Si(Li) detectors is below 130 eV (full width at one-half maximum) for MnKa radiation. The lithium-drifted detectors require cooling during operation, for which liquid nitrogen is often used.  See also: Junction detector

The resolution of the detector is closely linked to its temperature. Some types allow operation at room temperature with degraded resolution, or with Peltier cooling stages. The most recent development are superconducting tunneling junction devices, which are operated at liquid helium temperature. Their energy resolution is comparable to wavelength dispersive spectrometers or is even much better, particularly for light elements (Fig. 5).

 

 

Fig. 5  Spectrum of boron nitride partially covered with titanium powder obtained with a cryogenically cooled superconducting tunnel junction detector. The energy resolution of all lines up to several hundred electronvolts is around 10–12 eV. A crystal spectrometer with a multilayer mirror would have a resolution of about 16 eV at BKα. (After M. Frank et al., Cryogenic high-resolution x-ray spectrometers for SR-XRF and microanalysis, J. Synchrotron Rad., 5:515–517, 1998)

 

 

 

 

 

 

 

Analyzer

 

The output signals from the detector are fed into the analyzer, where the photon counts are stored in memory locations (1024–8192 channels are generally used) that are related to the energies of these photons. This also allows visual observation on a cathode-ray-tube screen of the accumulated spectrum and of the simultaneous counting process. Analyzers are usually provided with cursor markers to easily identify the peaks in the spectrum. Computer memories can be used for storage of the spectral counts, thus providing efficient access to computer routines for further data evaluation.

 

Use

 

Energy dispersive x-ray spectrometers are useful to accumulate spectra in short time intervals (for example, 1 min) that often allow a preliminary interpretation of the qualitative and quantitative composition of the specimen. The instruments are comparatively small, because they are designed to accept a large aperture of radiation. They require only low-power x-ray tubes that sometimes can be air-cooled.

 

Limitations

 

An important limitation of energy dispersive systems with Si(Li) detectors is the energy resolution, which is about an order of magnitude poorer in the lower energy region than that of crystal spectrometers. For example, the Kα lines of the transition elements overlap with the Kβ lines of the element preceding it in atomic number, causing severe analytical difficulties in an important region of the spectrum. The peak-to-background ratio is significantly lower than in crystal spectrometers because of the lower resolution. Another limitation is that the maximum number of photons that can be processed by the electronic circuits is limited to about 15,000–50,000 counts per second. This is the total photon count from the entire detected spectral region. Trace elements with low count rates in a matrix of high-count elements are therefore difficult to detect with sufficient statistical accuracy. Various attempts have been made to overcome this drawback by selectively exciting the elements of interest by using selective filters or secondary targets, which also greatly reduces the amount of x-ray-tube radiation that is scattered into the detector.

 

Microanalysis

 

The electron microprobe is widely used for elemental analysis of small areas. An electron beam of 1 micrometer (or smaller) is used, and the x-ray spectrum is analyzed with a focusing (curved) crystal spectrometer or with an energy dispersive solid-state detector. Usually two or three spectrometers are used to cover different spectral regions. Light elements down to beryllium, boron, and carbon can be detected. An important use of the method is in point-to-point analysis with a few cubic micrometers of spatial resolution. X-Y plots of any element can be made by moving the specimen to determine the elemental distribution.

Figure 6 illustrates the spectra obtained with three of the most frequently used methods of analysis. The specimen, a high-temperature alloy of the type used in aerospace and other industries, was prepared by the National Institute of Standards and Technology with stated composition in weight percent: molybdenum (Mo) 3.13, niobium (Nb) 4.98, nickel (Ni) 51.5, cobalt (Co) 0.76, iron (Fe) 19.8, chromium (Cr) 17.4, titanium (Ti) 0.85, and aluminum (Al) 0.085, total 99.27%.

 

 

Fig. 6  Fluorescence spectra of high-temperature alloy obtained with (a) crystal spectrometer, (b) energy dispersive method with x-ray-tube excitation, and (c) energy dispersive method with electron-beam excitation. Spectral lines: 1, Mo + NbLα + Lβ. 2, TiKα. 3, TiKβ. 4, CrKα. 5, NbKα1,2III. 6, MoKα1,2III. 7, CrKβ. 8, NbKβ1,3III. 9, FeKα. 10, MoKβIII. 11, CoKα. 12, FeKβ. 13, NiKα. 14, CoKβ. 15, NiKβ. 16, MoKα1,2II. 17, NbKβ1,3II. 18, MoKβ1,3. 19, NbKα. 20, MoKα. 21, NbKβ1,3. 22, MoKβ1,3.

 

 

 

fig 6

 

 

 

Figure 6a shows the high-resolution spectrum obtained in about an hour with a lithium fluoride (LiF; 200) crystal spectrometer using 50-kV, 12-milliampere x-ray-tube excitation and scintillation counter. This spectrum also contains the second-order (II) and third-order (III) crystal reflections of molybdenum and niobium whose Kβ1 and Kβ3 components are resolved. The lower resolution of the energy dispersive method is shown in Fig. 6b, recorded in about 10 min using 50-kV, 2-microampere x-ray-tube excitation, Si(Li) detector, and 40 eV per channel (about 400 channels are shown). The spectral range includes the unresolved molybdenum and niobium L lines and titanium. Figure 6c is an energy dispersive spectrum excited by a 25-keV electron beam. The molybdenum and niobium spectra are weakly excited at this low voltage and are not visible on the scale used in the plot. The differences in the relative intensities of the lines in the spectra arise from differences in the conditions of excitation and detection, and they illustrate the necessity of using the proper correction factors for each method of analysis to derive the correct weight percent composition.

 

 

Specimen preparation

 

The specimens may be in the form of powders, briquettes, solids, thin films, or liquids. The surface exposed to the primary x-ray beam must be flat, smooth, and representative of the sample as a whole, because usually only a thin surface layer contributes to the fluorescent beam in a highly absorbing specimen. The thickness of this layer is called information depth and may be only a micrometer or less for electron-beam excitation and 10–100 μm or more for x-rays. The degree of surface roughness, which is difficult to measure quantitatively, causes losses in intensity and results in errors in the analysis. Consequently, solid samples are generally polished; and then, if necessary, they are lightly etched or specially cleaned to remove contaminants. This is particularly important when light elements are measured. Special care must be taken when a measured element is a constituent of such surface contamination.

 

Powders

 

Powders are processed in one of two ways. The first is to press the ground material into briquettes. The pressure should be several tons per square centimeter (1 ton/cm2 equals approximately 15,000 lb/in.2 or 100 megapascals), and in most cases organic binders have to be used to improve the mechanical stability. The second way is to use fusion techniques, where the powders (mostly mineralogical or metal oxides) are dissolved at high temperatures in borax or similar chemicals, and glassy pellets are obtained after cooling. The advantage of the second method is a high homogeneity of the specimen and a reduction of interelement effects; but the intensities are reduced.

 

Liquids

 

Liquids can be analyzed by using small containers with a thin window cover. Examples are sulfur determination in oils during the refining process, lubrication oil additives, the composition of slurries, and the determination of lead, zinc, and other elements in ore processing. Low concentrations of elements in solution can be concentrated with specific ion-exchange resins and collected on filter papers for analysis. Gases containing solid particles can be filtered and the composition of the particles determined as for atmospheric aerosol filters for environmental studies. In certain industrial applications, liquids are continuously analyzed while flowing through a pipe system with a thin window in the x-ray apparatus.

 

 

Quantitative analysis

 

The observed fluorescent intensities must be corrected by various factors to determine the concentrations. These include the spectral distribution of the exciting radiation, absorption, fluorescence yield, and others. Two general methods have been developed to make these corrections: the fundamental parameter method and the empirical parameter method.

 

Fundamental parameter method

 

In the fundamental parameter method, a physical model of the excitation is developed and described mathematically. The method derives its name from the fact that the physical constants, like absorption coefficients and atomic transition probabilities, are also called fundamental parameters. Primary and secondary excitation are taken into account; the first is the amount of fluorescent radiation directly excited by the x-ray tube. Secondary excitation is caused by other elements in the same specimen, whose fluorescent radiation has sufficient energy to excite the characteristic radiation of the analyzed element. In practical applications, the count rate must be calibrated for each element by comparing it to the count rate from a standard of accurately predetermined composition. A standard may contain several elements or can be a pure element.

The fundamental parameter method is capable of accuracies around 1% (absolute weight percentage) for higher concentrations, and between 2 and 10% (relative) for low concentrations. The method has the advantage of allowing the use of pure-element standards. Significantly higher accuracies can be obtained with standard specimens of similar composition to the unknown.

The fundamental parameter method can also be used to determine thickness and chemical composition of thin films.

 

Empirical parameter method

 

The empirical parameter method is based upon simple mathematical approximation functions, whose coefficients (empirical parameters) are determined from the count rates and concentrations of standards. A widely used set of approximation functions is given by Eq. (3),

 

 

fur 3

 

where ci is the concentration of the analyzed element i in the unknown specimen, r is the corresponding count rate, Ri is the count rate from a pure-element specimen i, Ci are the concentrations of the other elements in the unknown specimen, n is the number of elements, and αi are the empirical parameters (also called alpha coefficients).

A minimum of n − 1 standard specimens, each of which contains the full set of n elements (or a correspondingly higher number, if they contain fewer elements), is required to calculate the empirical parameters, αij, before actual analysis of an unknown is possible. In practical applications, however, at least twice as many standards should be used to obtain good accuracy, thus requiring considerable effort in standard preparations. The empirical parameter method is therefore mainly used in routine applications, where large numbers of similar specimens must be analyzed. The accuracy of the method depends upon the concentration range covered by the standards; around ±0.1% or better can be obtained if a set of well-analyzed standards with similar compositions to the unknowns are used. If pure-element standards are not available, the pure-element counts rates, Ri in Eq. (3), can also be determined by computation from additional multielement standards.

 

Trace analysis

 

There are two distinct analytical tasks that are called trace analysis: the detection or quantification of small amounts of a material (possibly a pure element), and the determination of very low concentrations in an abundantly available sample. In both cases, the relationship between concentration and count rates is practically linear. The minimum detection limit is defined by that amount or concentration for which the peak is just statistically significant above background level B, usually 3B1/2. The background arising from scattered continuous radiation from the x-ray tube is a limiting factor in determining the peak-to-background ratio. Since intensity measurements can theoretically be made arbitrarily accurate by using long counting times, the minimum detection limits could be indefinitely low. However, in practice, the limiting factors are the background level and long-term instrument drift. Depending upon excitation conditions, matrix, and counting times, traces in the parts-per-million region may be detected with conventional instruments, and in the parts per trillion region by total reflection x-ray fluorescence.

 

Total reflection XRF (TRXFA)

 

Ultra-trace analysis by x-ray fluorescence is possible by a special technique and instrumentation which is based upon background suppression by total reflection of the primary x-ray beam. The physical explanation is that the index of refraction of x-rays is very slightly smaller than 1, and a beam impinging at a flat surface at angles of a few tenths of a degree is totally reflected without noticeably penetrating the material. In practice, a substrate of a silicon-single crystal (such as a wafer) is used and a small droplet of dissolved analyte material applied and dried. The x-ray beam penetrates only the sample material, not the substrate. A Si(Li) energy dispersive detector is placed at close distance to the specimen. With conventional x-ray tubes, detection limits in the picogram range have been reported, and in the femtogram range by using synchrotron radiation. Total reflection x-ray fluorescence analysis instrumentation is commercially available (Fig. 7).

 

 

Fig. 7  Example of trace analysis by total reflection x-ray fluorescent analysis (TXRF). A droplet containing 3 ng dissolved nickel (Ni) was applied to a substrate (silicon-wafer), dried, and measured. The sensitivity S in this particular setup was 20 counts per second and per nanogram Ni, and the theoretical detection limit for 100 s counting time was 4 picograms corresponding to 4 × 1010 atoms/cm2. The elements sulfur (S), potassium (K), and iron (Fe) are contaminants of the solvent, and the silicon (Si) and oxygen lines originate mainly from a thin silicon dioxide (SiO2) layer on top of the wafer. (Data provided by P. Wobrauschek, Atominstitut der Österreichischen Universitäten, Vienna).

 

 

 

fig 7

 

 

 

 

Thin-film analysis

 

As a rule of thumb, materials with a thickness exceeding a few hundred micrometers can be considered “infinitely thick” from the viewpoint of x-ray fluorescence. This limit decreases by a factor 5–20 for light elements. The intensities of thinner specimens are correspondingly lower, depending upon element, matrix, and experimental setup. In the analysis of very thin films (a few tens of nanometers), the count rates are a linear function of element concentration and of film thickness. Absorption and interelement effects must be taken into account in the analysis of thicker films and foils. This can be done with special fundamental parameter methods, but it requires adequate computing power for efficient evaluation of data.

Fundamental parameter methods allow the determination of thickness and element concentrations of thin films as well as individual layers in multilayer structures. Limitations apply to common elements of two or more layers and with respect to very light elements.

 

Limitations on accuracy

 

In both the fundamental parameter and empirical parameter methods, limitations of the accuracy are due mainly to uncertainties in the composition of the standards and variations in the specimen preparation; intensity fluctuations due to counting statistics and instrument instabilities may also contribute.

 

 

Supplemental methods

 

As in all analytical methods, it is sometimes necessary to supplement the chemical data from fluorescence analysis with data by other methods to properly characterize the material. The first three elements in the periodic table (hydrogen, helium, lithium) cannot be measured by x-ray fluorescence, because none of their emission lines are in the x-ray regime. The light elements beryllium through magnesium (including such important elements as carbon, oxygen, and nitrogen) can be measured, but frequently with difficulties. Often they are crucial in the characterization of a specimen, such as carbon in steels, and oxygen in rocks and oxide samples, which may require optical emission, atomic absorption, Auger and electron spectroscopy, or other analytical methods.  See also: Analytical chemistry; Atomic spectrometry; Surface physics

An important supplementary method is x-ray polycrystalline diffraction, in which the crystalline chemical phases are identified by comparing the pattern of the unknown with standard patterns. Computer methods are widely used to search the 40,000 phases currently contained in the Powder Diffraction File published by the International Center for Diffraction Data, Newtown Square, Pennsylvania. Mixtures of phases can be quantitatively determined, and there are no limitations on the chemistry of the substances. By combining the chemical data from fluorescence with the phase data from diffraction, the relation between the constituents of the sample and its properties can be established.  See also: X-ray diffraction

 

Applications

 

X-ray fluorescence analysis is widely used for compositional control in large-scale industrial processing of metals and alloys, cements, the petroleum industry, and inorganic chemicals. Among the many other major applications are geological exploration and mineralogical analysis, soils and plants, glasses, corrosion products, the analysis of raw materials, and the measurement of plating coating thickness. It is an important method in materials characterization for research and technology, providing chemical information without destroying the sample. It is the only feasible method for many complex analyses that would require extremely long times by conventional wet chemical methods on materials such as the refractory metals, high-speed cutting steels, and complex alloys.

Besides the large-scale industrial applications, the method has been used in a variety of analyses in the medical field, for environment protection and pollution control, and for many research applications. Examples are trace analysis of heavy metals in blood; analysis of airborne particles, historic coins, potteries, lead and barium in Roman skeletons, and various elements in archeological specimens; analysis of pigments to establish authenticity of a painting (Fig. 8); quality control of noble metals in alumina-based exhaust catalysts for cars; and analysis of ash and sulfur in coals, slags from furnace products, and surface deposits on bulk metals. The method is also widely used in forensic problems, where it is often combined with x-ray powder diffraction. Remote analysis of rocks using x-ray spectrometers carried by spacecraft and stellar landers has proven to be a valuable source of information in search of the origin of the solar system and its planets.

 

 

Fig. 8  Analysis of pigments in an Indian miniature, Mughal period, seventeenth century, Schloss Schönbrunn, Vienna. In the detail, the headdress (marked area) is approximately 2.1 × 1.6 in. (50 × 40 mm) and was measured in pixel steps of 0.1 in. (2.5 mm). The distribution of the elements copper, lead, and gold is shown, indicating usage of lead-white, minimum (red), azurite (blue), malachite (green) and metallic gold. (Analysis by M. Schreiner, Akademie der Bildenden Künste, Vienna. Copyright, Österreichisches Bundesdenkmalamt, Vienna)

 

 

 

fig 8

 

 

 

  • Advances in X-ray Analysis, annually
  • E. P. Bertin, Introduction to X-ray Spectrometric Analysis, 1978
  • K. F. J. Heinrich, Electron Beam X-ray Microanalysis, 1981
  • K. F. J. Heinrich et al. (eds.), Energy Dispersive X-ray Spectrometry, NBS Spec. Publ., no. 604, 1981
  • R. Jenkins, X-ray Fluorescence Spectrometry, 1988
  • R. Jenkins, R. W. Gould, and D. Gedke, Quantitative X-ray Spectrometry, 2d ed., 1995
  • G. R. Lachance, F. Claisse, and H. Chassin, Quantitative X-ray Fluorescence Analysis: Theory and Application, 1995
  • K. L. Williams, Introduction to X-ray Spectrometry, 1987

     

     

     

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